Processing Equipment×エア・ウォーター・メカトロニクス - List of Manufacturers, Suppliers, Companies and Products

PioClean exhaust gas treatment system

【Features】 - The combination of a simple flow design and the highly efficient PAIKLINK cartridge allows for the economical and safe removal of toxic gases. - By installing options such as gas detectors, safety can be enhanced. - In the case of a two-tube system, the downtime of the equipment during cartridge replacement can be reduced. *For more details, please refer to the PDF document or feel free to contact us.

Company：エア・ウォーター・メカトロニクス
Price：Other

Gas Generator

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Combustion-type exhaust gas treatment device

It is a combustion-type exhaust gas treatment device.

This device processes exhaust gases such as hydrogen compounds like SiH4, and fluorinated compounds like C2F6 and SF6, which are emitted by semiconductor manufacturing equipment, by utilizing the thermal exhaust from a combustion burner for thermal decomposition. Additionally, the products generated after thermal decomposition (such as SiO2 powder and acidic gases) are further processed in a wet scrubber within the same package. 【Features】 - By separating the combustion nozzle and the secondary combustion chamber, stable combustion is possible during flow rate fluctuations. - It can handle exhaust gases with a maximum processing flow rate of 500 L/min (capable of supporting up to 4 ports). - Wall air prevents the adhesion of by-products inside the combustion chamber. - The adoption of a direct cooling method using water spray immediately after the combustion tube has achieved space-saving design. - Continuous stirring of the circulating water in the wet scrubber tank prevents circulation pump troubles caused by SiO2 powder slurry. - Equipped with various sensors, ensuring comprehensive safety measures. - The touch panel allows for easy operation and monitoring of the operating status. *For more details, please refer to the PDF materials or feel free to contact us.*

Company：エア・ウォーター・メカトロニクス
Price：Other

Gas Generator

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Adsorption regenerative exhaust gas treatment device

It is a wet exhaust treatment system for the etching process.

This device is a wet scrubbing system for the etching process. It can remove target gases such as Cl2, HBr, BCl3, HCl, HF, SiF4, etc., to levels below the TLV values, which conventional wet scrubbing could not achieve. 【Features】 - The adsorption tube is regenerated with water, resulting in a long cartridge lifespan. - Only water is used, eliminating alkaline contamination. - The low water usage reduces running costs. - The structure minimizes clogging at the gas-liquid contact area. - Continuous scrubbing is possible due to the automatic alternating operation of the adsorption tubes. *For more details, please refer to the PDF document or feel free to contact us.

Company：エア・ウォーター・メカトロニクス
Price：Other

Separation device
Gas Generator

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Processing Equipment×エア・ウォーター・メカトロニクス - List of Manufacturers, Suppliers, Companies and Products

Processing Equipment Product List

PioClean exhaust gas treatment system

Combustion-type exhaust gas treatment device

Adsorption regenerative exhaust gas treatment device